(GAS) EL-FLOW Prestige Series​

Accuracy (incl. linearity)

(based on actual calibration,

according SEMI E56)

standard: ±0,5% Rd plus ±0,1% FS

(±0,8% Rd plus ±0,2% FS for ranges 3~5 mln/min;

±1% Rd plus ±1% FS for ranges < 3 mln/min)

Repeatability

0-20% < ± 0,04% FS;

20-100% < ± 0,2% Rd

Turndown

1:150; in analog mode 1:50

Multi Gas/Multi Range gases

embedded gas data for 100 unique gases

(see FAQ section on our website) plus any mixture

of maximum 5 of these gases.

Settling time

fast: < 500 msec

standard: < 1 sec

slow: < 2 sec

Operating temperature

-10~70°C

Temperature sensitivity

zero: < 0,02% FS/°C;

span: < 0,025% Rd/°C

Pressure sensitivity

standard: < 0,15% Rd/bar typical N2;

with pressure correction: < 0,02% Rd typical N2

Accuracy of integrated

pressure sensor (PI option)

± 0,25% FS at ambient temperature

어플리케이션

유량 범위

Lowest range 0,014~0,7 mln/min

Up to highest range 2~100 ln/min