(GAS) EL FLOW Classic Series​

Flow ranges

from 0.16~8 sccm up to 0.4~20 slm;  

intermediate flow ranges available

Accuracy (incl. linearity)

±1% FS (based on actual calibration)

Turndown

1 : 50

Repeatability

< 0,2% Rd

Settling time

1~2 seconds

Operating pressure

0~30 bar(g)

Operating temperature

0~50°C

Temperature sensitivity

zero: < 0.1% FS/°C; span: < 0.1% Rd/°C

Warm-up time

30 min. for optimum accuracy

Leak integrity, outboard

< 2 x 10-9 mbar l/s He

Control valve

normally closed solenoid valve

Power supply

+15~24 Vdc

Analog output/command

0~5 Vdc or 4~20 mA (sourcing output)

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