EL-FLOW Metal Sealed

Gas Mass Flow Meters / Controllers



  • High accuracy (standard ±0,5% RD plus ±0,1% FS)
  • Resealable metal-to-metal outer seal construction (no rings) 
  • Electropolished wetted parts
  • Cleanroom assembled
  • Multi Gas / Multi Range functionality
  • Analog and digital I/O, with optionally integrated interface to
    DeviceNet™, PROFIBUS DP, Modbus, EtherCAT or FLOW-BUS
  • Super stable zero (no need for auto-zero circuit)